Microlithography
Science and Technology
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.
Specificaties
| ISBN/EAN | 9781032836737 |
| Auteur | Bruce W. Smith |
| Uitgever | Van Ditmar Boekenimport B.V. |
| Taal | Engels |
| Uitvoering | Paperback / gebrocheerd |
| Pagina's | 850 |
| Lengte | |
| Breedte |