Extreme Ultraviolet Lithography
Discover refined techniques in EUV lithography with updates detailing exposure tools, light sources, masks, resists, metrology, and computational lithography. Addressing cost and process control, the work offers practical insights from a seasoned lithographer operating in manufacturing and development.
Specificaties
| ISBN/EAN | 9781510692534 |
| Auteur | Harry J. Levinson |
| Uitgever | Van Ditmar Boekenimport B.V. |
| Taal | Engels |
| Uitvoering | Paperback / gebrocheerd |
| Pagina's | 344 |
| Lengte | |
| Breedte |